JPH0398447U - - Google Patents
Info
- Publication number
- JPH0398447U JPH0398447U JP766090U JP766090U JPH0398447U JP H0398447 U JPH0398447 U JP H0398447U JP 766090 U JP766090 U JP 766090U JP 766090 U JP766090 U JP 766090U JP H0398447 U JPH0398447 U JP H0398447U
- Authority
- JP
- Japan
- Prior art keywords
- circuit pattern
- alignment mark
- photomask
- edge
- transferred
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP766090U JPH0398447U (en]) | 1990-01-30 | 1990-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP766090U JPH0398447U (en]) | 1990-01-30 | 1990-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0398447U true JPH0398447U (en]) | 1991-10-14 |
Family
ID=31511315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP766090U Pending JPH0398447U (en]) | 1990-01-30 | 1990-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0398447U (en]) |
-
1990
- 1990-01-30 JP JP766090U patent/JPH0398447U/ja active Pending